产品名称：ULVAC爱发科大容量DC电源

特点

• 轻量・省空间
• 轻量・省空间的设计，安装简易
• 输出电压范围可选
• 除800V规格外，还提供1000V规格。
• 丰富的电弧处理
• 丰富的电弧控制系统。
• 不需要冷却水
• 强制空冷系统，不需要冷却水。
• 可以安装高速电弧中断回路
• 实现标准的低电弧能量。 此外，可以安装可选的高速电弧中断电路。
• 自由的并联操作功能
• DC-10，DC-20：可选的并联运行功能允许自由组合10kW和20kW，并联运行多达12个单元。 （*高240千瓦）

• 用途

• FPD用溅射设备
• 半导体用溅射设备
• 触摸屏用溅射设备用
• 工业涂层用溅射设备

  规格

  Model		DC-10-AM	DC-10-H-AM	DC-10-4-AM	DC-20-AM	DC-20-H-AM	DC-20-4-AM
  Input specification	Rated input voltage	3-Phase 187 to 229VAC		3-Phase AC342 to 440V	3-Phase 187 to 229VAC		3-Phase AC342 to 440V
  	Input capacity	13.5kVA or less			25kVA or less
  Output specification	Maximum rated power	10kW			20kW
  	Rated current	25A	18A	25A	50A	40A	50A
  	Rated voltage	-800V	-1000V	-800V	-800V	-1000V	-800V
  	Ignition voltage	-1500V
  	Abnormal discharge control	Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
  Control	Control method	Constant power control (P control)/constant current control (I control)/constant voltage control (V control)
  	Control precision	Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
  	Control warranty scope	Constant power control, 10 to 100％ of rated power value
  	Extenal interface	analog/digital,RS-232C or 485
  Parallel operation		Up to 12units can be controlled by master/slave communication
  Cooling method		Forced air-cooling
  Dimension　W×D×H		483×630×133mm (excluding protrusions)
  Weight		29kg			36kg
  Applicable standard		CE/ SEMI F47/ RoHS

  
  

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